QMC CPI Series는 반도체 Wafer 검사 목적의 MEMS Prober Card 제조용 Probe Pin 자동 삽입 장비입니다.
Item | CPI-100 |
---|---|
Substrate | MEMS Probe Card용 세라믹 기판; 120 x 120mm |
Configuration | Pin Magazine, Transfer, Gripper, Stage, Vision, Tapping |
System dimension(W x D x H) | 1,800mm x 1,470mm x 1,800mm |
Throughput Tact Time | ≤ 10 sec/pin |
Throughput UPH | ≥ 360 pin/hour |
Pin Insert | Yield ≥ 99% |
Stage | X, Y, Z Axis(Linear Motor Drive) |
Gripper | X, Y, Z, Tx, Ty, Grip Axis(Piezo Motor Drive) |
Vision | 2/3“ Camera, Pixel Resolution: 0.345 μm |
Load/Un-Load | Manual (Pin Magazine/Pin Block) |
Copntrol S/W | PC Control |