Probe Card
Auto Pin Insert System - MEMS Probe Card

CPI Series

CPI-100

QMC CPI Series는 반도체 Wafer 검사 목적의 MEMS Prober Card 제조용 Probe Pin 자동 삽입 장비입니다.

OUTPUT


 

FEATURES
  • High Performance
    Pin Size ≥ 30um x 30um
    Tact time ≤ 10 sec/pin
  • High Yield; Pin Insert ≥ 99%
  • Process Stability
    3단계 검사를 통한 Insert 수율 향상
    하중 제어를 통한 안정적 Inserting.
SPECIFICATION
Item CPI-100
Substrate MEMS Probe Card용 세라믹 기판; 120 x 120mm
Configuration Pin Magazine, Transfer, Gripper, Stage, Vision, Tapping
System dimension(W x D x H) 1,800mm x 1,470mm x 1,800mm
Throughput Tact Time ≤ 10 sec/pin
Throughput UPH ≥ 360 pin/hour
Pin Insert Yield ≥ 99%
Stage X, Y, Z Axis(Linear Motor Drive)
Gripper X, Y, Z, Tx, Ty, Grip Axis(Piezo Motor Drive)
Vision 2/3“ Camera, Pixel Resolution: 0.345 μm
Load/Un-Load Manual (Pin Magazine/Pin Block)
Copntrol S/W PC Control