n  Semi-automatic operation system

-         10 wafer cassette

-         60 carrier pallet magazine

-         Automatic vision inspection; 극성판별, 양품, 불량 판별(Defect, pollution)

-         Automatic carrier 위치확인기능

-         Automatic carrier position check

-         High sorting accuracy; ±20um, ±2degree

-         Easy operation GUI