n High speed performance for mass production
- Cycle time: 0.2sec/die
- UPH: 18,000ea/hr
n Full automatic operation system
- 25 wafer cassette
- Automatic wafer alignment and probing
- Automatic vision inspection of LED chip appearance
- Barcode reader for wafer ID management
n High accuracy
- Improved measurement accuracy of optical property with Integrating sphere
- High resolution (1pA/1uV) in induced current/voltage and measured current/voltage
- Spectral measurement resolution: Less than ±0.6nm
n Optical∙Electrical measurement
n High efficiency
- Attachable probe card for easy-to-exchange
- Special type illumination of vision system for PSS wafer & RS wafer
- Automatically classify rank based on measurement data
Features
